GAS ORGANOMETALLIC THICK FILM SENSORS

Alena Pietriková - Ján Urbančík

   This paper presents an overview of theoretical, chemical and operating principles of semiconductor gas sensors, thick film materials for gas monitoring sensors with emphasis on sensitive organometallic thick film paste and on technical realisation of a selective gas (methane) sensor. The design and topology of sensing and heater parts, selection of thick film materials, based on organometallic SnO₂ paste, the level of working temperatures, the influence of seasoning conditions on the sensor sensitivity and stability were made by sensor investigations. The authors present results of the final parameters of thick film methane sensors developed at the Department of Hybrid Microelectronics FEI~TU in Košice.

Keywords: thick film, gas sensor

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