ONE YEAR SINCE FIRST DIAMOND AND DIAMOND LAYERS PREPARATION AT DEPARTMENT OF MICROELECTRONICS, SLOVAK TECHNICAL UNIVERSITY
Ján Janík
In this article are described the first successful experiments that has led to diamond
crystals and diamonds layers preparation. Layers was prepared by hot filament chemical
vapor deposition technique (HF CVD). The single diamond micro-crystals grew at first
and free-standing layers about 100 micrometers thickness was prepared at the end.
A results of the first diamond layers analyses (Raman spectrometry, X-ray diffraction
spectrometry and optical and SEM microscopy) are presented.
Keywords: diamond films, hot filament chemical vapor deposition
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