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[05-06, 2000] 

Journal of Electrical Engineering, Vol 51, 05-06 (2000) 168-171

ONE YEAR SINCE FIRST DIAMOND AND DIAMOND LAYERS PREPARATION AT DEPARTMENT OF MICROELECTRONICS, SLOVAK TECHNICAL UNIVERSITY

Ján Janík

   In this article are described the first successful experiments that has led to diamond crystals and diamonds layers preparation. Layers was prepared by hot filament chemical vapor deposition technique (HF CVD). The single diamond micro-crystals grew at first and free-standing layers about 100 micrometers thickness was prepared at the end. A results of the first diamond layers analyses (Raman spectrometry, X-ray diffraction spectrometry and optical and SEM microscopy) are presented.

Keywords: diamond films, hot filament chemical vapor deposition


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