LARGE-AREA 3D SURFACE STANDARDS WITH POLYIMIDE FOR CALIBRATION OF STYLUS AND OPTICAL PROFILOMETERS

Ladislav Matay- Robert Andok- Ivan Kostič - Gian Bartolo Picotto - Marco Pisani

   At present, it is recognized for both research and applications that there is a need of accurate calibration methods and suitable test structures as well as improvements of the instrumentation for better positioning and stability of the probe. In the meantime, for surface thickness measurements of wafers, layers and films, for step height and groove depth made by capacitive instruments, as well as for stylus and optical profilometers, there is a need of multistep height standards that could be used for calibration of various magnifications of such instruments as well as for calibration of the vertical magnification of the stylus and optical profilometers. The overall objectives of the work described herein are to develop new microtechnological processes leading to fabrication of 3D standards with polyimide (PI) for scanning probe microscopy and step-height measurements.

Keywords: 3D standards, polyimide, profilometers, calibration, RIE, wet etching

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