LASER-DEPOSITED TIN ACETYL-ACETONATE FILMS AS ACTIVE LAYERS OF GAS SENSORS

Martin Vrňata - Vladimír Myslík - Filip Vysloužil - Miroslav Jelínek

   The contribution is concerned with the preparation of tin acetyl-acetonate (SnAcAc) employing laser ablation and subsequent deposition (LAD) technology. As the conductivity of these layers depends strongly on the composition of the surrounding atmosphere (namely on the presence of reducing gases), SnAcAc is suitable for active layers of gas sensors. It is an alternative to conventionally used inorganic materials- SnO₂, In₂O₃; and TiO₂. This article presents the description of LAD technology, FTIR spectra of deposited layers and the dependences of sensitivity to hydrogen, carbon monoxide and methane of SnAcAc- based sensors on the activation temperature and on the presence of surface Pt catalyst.

Keywords: laser deposition, tin acetyl-acetonate, gas sensor

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