INTEGRATED CONVERTER OF PRESSURE/VACUUM TO FREQUENCY BASED ON LTCC TECHNOLOGY
Stanislav Slosarčík - Wlodzimierz Kalita - Jerzy Potencki - Juraj Banský
The idea of a pressure/vacuum to voltage or frequency integrated
converter based on use of the low temperature cofired ceramics to
create the hybrid functional specialized structure has been presented.
The pressure/vacuum sensor is formed by a circular ceramic membrane
on which the resistors of a bridge system are located. The idea of
operation of the sensor is based on piezoresistive effect resulting
from the strain of membrane under the influence of pressure or vacuum.
The converter system includes: pressure/vacuum sensor, specialized
integrated circuits for digital conversion of bridge output signal
to standard voltage, instrumental amplifier, the voltage to frequency
converter and a power supply circuit. Typical sensitivity of elaborated
converter system is equal to 2 Hz/mbar or 2 mV/mbar.
Keywords: pressure sensor, hybrid microcircuits, LTCC ceramics