QUANTITATIVE AUGER ELECTRON SPECTROSCOPY UTILIZING THE SPECTRAL BACKGROUND

Jozef Liday - Peter Vogrinčič - Juraj Breza

   The paper presents the results of quantitative Auger electron spectroscopy (AES) of non-saturated oxides SiO_x (SIPOS) by means of a method that makes use of the peak-to-background (I_i) ratio. Detection of two phases in the studied SIPOS layers suggests that the conventional method of quantitative spectra interpretation, although often applied to similar oxides in the literature, can not yield reliable results. The results of quantitative AES obtained by the proposed and conventionally used procedures are compared with those of secondary neutral mass spectrometry (SNMS).

Keywords: Auger electron spectroscopy, AES, silicon oxides, SIPOS

[full-paper]