UNCONVENTIONAL APPLICATION OF LOW TEMPERATURE COFIRED CERAMICS FOR (UNDER -) PRESSURE SENSORS

Stanislav Slosarčík - Juraj Banský - Miroslav Dovica - Milan Tkáč

   Materials science and engineering require coordinated interdisciplinary efforts spanning from basic science to real devices and (micro) systems including all materials classes. One of these Low-Temperature-Cofired-Ceramic (LTCC), commonly called "Green Tape" (GT), is found to have a great potential for various applications. These include the more conventional use for hybrid electronic circuits and microsystems with high packing density as well as more advanced strategies targeting towards complex 3-dimensional (3D) structures with buried channels and multicavities. In our paper we present and discuss experimental results on novel, purely LTCC ceramics based pressure sensors.

Keywords: sensor, multilayer, LTCC, ceramic, pressure

[full-paper]