LINEAR TIME-OF-FLIGHT MASS SPECTROMETER FOR STUDIES OF ELECTRONIC EFFECTS IN LOW ENERGY NEUTRAL OR ION SPUTTERING
Jan Lörinčík - Zdeněk roubek
In this article the construction and performance of a linear
time-of-flight secondary ion mass spectrometer (TOF SIMS) is
described. This TOF SIMS was designed for studies of excitation
and ionization phenomena in low energy ion and neutral sputtering.
Keywords: time-of-flight, TOF, secondary ion mass spectrometry, SIMS