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[09-10, 1998] 

Journal of Electrical Engineering, Vol 49, 09-10 (1998) 248-254

LINEAR TIME-OF-FLIGHT MASS SPECTROMETER FOR STUDIES OF ELECTRONIC EFFECTS IN LOW ENERGY NEUTRAL OR ION SPUTTERING

Jan Lörinčík - Zdeněk Šroubek

   In this article the construction and performance of a linear time-of-flight secondary ion mass spectrometer (TOF SIMS) is described. This TOF SIMS was designed for studies of excitation and ionization phenomena in low energy ion and neutral sputtering.

Keywords: time-of-flight, TOF, secondary ion mass spectrometry, SIMS


[full-paper]


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