STRUCTURAL STUDY OF DIAMOND FILMS GROWN ON SILICON WAFER BY HOT-FILAMENT CHEMICAL VAPOUR DEPOSITION METHOD
Viliam Malcher - Ján Janík - Viera Dúbravcová - Alexander Šatka - Pavol Veis
Diamond films have been grown on mirror-polished single
crystal Si(100) by hot-filament chemical vapour deposition.
The application of micro-Raman spectroscopy for
characterizing carbon bonding in diamond thin films is used.
An analysis by micro-Raman shows how the diamond and non-
diamond phases are distributed within the film. The phonon
line at 1.68 eV has been found. The results are compared
with diamond films grown by microwave-plasma chemical vapour
Keywords: hot-filament chemical vapour deposition, micro-Raman spectroscopy, diamond films