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[11-12, 2004] 

Journal of Electrical Engineering, Vol 55, 11-12 (2004) 332-334

INVESTIGATION OF CARBON PHASES IN DIAMOND AND DIAMOND-LIKE CARBON HF CVD FILMS BY RAMAN SPECTROSCOPY

Magdaléna Kadlečíková - Juraj Breza - Anna Vojačková - Marián Vojs - Zdeněk Frgala - Otto Csabay - Tibor Daniš

   Raman spectroscopy is employed to characterize thin diamond and diamond-like carbon (DLC) films deposited by HF CVD and MW CVD on sapphire, WC-Co and silicon substrates. Raman spectroscopy is able to identify different carbon phases. The technique allows to distinguish between various types of carbon such as diamond, nano-crystalline diamond, graphite, amorphous carbon, diamond-like carbon and hydrogenated carbon. The Raman spectra contain, besides the peaks of various phases of carbon, also a luminescence band.

Keywords: CVD, diamond, DLC, Raman spectroscopy


[full-paper]


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