MEASUREMENT SYSTEM WITH HALL AND A FOUR POINT PROBES FOR CHARACTERIZATION OF SEMICONDUCTORS

Rudolf Kinder – Miroslav Mikolášek – Daniel Donoval – Jaroslav Kováč – Marek Tlaczala

   This article describes the design, construction and control program of an automatic measuring system (AMS), which was designed for sheet resistance and sheet Hall mobility measurements. The van der Pauw technique and 4-point probe method are used to measure sheet resistance and calculate the specific resistance. Furthermore, the software of the AMS contains graphical subroutines for conversion of resistivity to concentration and mobility. Hall effect and electronic transport measurements are invaluable for understanding and characterization of the physical properties of semiconductors such as Si, GaAs, ZnO, and nanocrystal diamond as well as other electronic and magnetic materials.

Keywords: Hall system, van der Pauw, 4-point probe, Si, ZnO

[full-paper]