AN AUTOMATIC MEASUREMENT SYSTEM WITH SPREADING RESISTANCE AND PCIV PROFILING FOR CHARACTERIZATION OF SEMICONDUCTORS
Rudolf Kinder - Ladislav Hudec - Tomáš Chmel -Ladislav Hulenyi - Marián Kuruc
This article deals with the design and a control program of an automatic measuring system (AMS). The AMS allows to obtain the carrier concentration profile n(x) from the spreading resistance (SRP, with single point probe) and point contact current voltage (PCIV) measurements on a bevelled structure. The software of the AMS contains the possibility of calibration needed for converting the measured data into a carrier concentration profile and graphical subroutines for conversion of the resistivity to concentration. The software of the AMS further permits monitoring of running measurements by SRP and PCIV by LAN networks. The attained results in designing and creating the control program were verified by measuring and determining the carrier concentration profile on selected structures. The experimental n(x) profile has been compared with that calculated by program SUPREM.
Keywords: spreading resistance, PCIV, Si, SUPREM