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[3, 2009] 

Journal of Electrical Engineering, Vol 60, 3 (2009) 166-169

PERIODIC STRUCTURES PATTERNED ON METAL AND III-V COMPOUND SURFACES USING TWO-BEAM INTERFERENCE METHOD

Dušan Pudiš - Jaroslava Škriniarová - Ivan Martinček - Jaroslav Kováč Jr - Norbert Tarjányi - Štefan Haščík

   We present an optical interference method as an efficient tool for high quality one- and two-dimensional periodic structure fabrication for photonic applications. Different types of two-dimensional periodic structures are prepared using a two-beam interference technique by double exposure process. also the patterning of an au layer deposited on glass and GaAs substrates is provided using the two-beam interference method. Quite homogeneous and two- dimensional structures with small periodicity were prepared into the photoresist, Au layer and GaAs substrate. the experimentally prepared structures are well in agreement with the theoretically designed ones.

Keywords: periodic structure, interference, holographic lithography


[full-paper]


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