ZINC OXIDE – A UNIQUE MATERIAL FOR ADVANCED PHOTOVOLTAIC SOLAR CELLS

Soňa Flickyngerová – Vladimír Tvarožek – Pavol Gašpierik

   A novel approach to the preparation of thin films by using RF diode sputtering was developed. In one deposition run, thin films of doped ZnO:(Al, Ga) were obtained with different structural, optical and electrical properties. ZnO:Al films of low resistivities in order of 10^-3 Ωcm and high optical transmittances about 93 % have appeared the most suitable for photovoltaic applications.

Keywords: thin film solar cell, Zinc oxide, sputtering

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