CORRELATION OF SELECTED PROBLEMS DURING GaN MOVPE EPITAXY ON Si SUBSTRATES WITH IN-SITU INTERFEROMETER OBSERVATION
Tomasz Szymański – Mateusz Wośko – Bogdan Paszkiewicz –
Kornelia Indykiewicz – Regina Paszkiewicz
In this paper, selected problems occurring during GaN epitaxy on Si substrates are correlated with in-situ interferometer observations based on structures fabricated using 3×2'' Thomas Swan Close Coupled Showerhead MOVPE system. Samples were epitaxially grown on highly resistive >500 Ω cm p-type 2'' silicon substrates. The growth was observed using an interferometer acquiring reflectance traces in-situ. To avoid issues that are shown in this paper, different approaches of the so-called buffer layer were used by depositing them on Si before the growth of GaN. Different material qualities of grown GaN layers were obtained by variation in films constituting the buffer layer grown before the desirable GaN film. The study shows the evolution of the grown samples, improvement of various parameters and also gradual reduction of material issues discussed in this paper. Improvement in GaN layer was mainly observed by SEM characterization and studying the growth mechanisms through observation of reflectance traces obtained in-situ.
Keywords: Gallium nitride, GaN on Si, MOVPE, transition AlGaN, in-situ observation