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[6, 2009] 

Journal of Electrical Engineering, Vol 60, 6 (2009) 346-349

WIRELESS TEMPERATURE MEASUREMENT IN THE HOT FILAMENT CVD REACTOR FOR DEPOSITION OF CARBON NANOTUBES

Michal Kolmačka – Magdaléna Kadlečíková – Juraj Breza – Filip Lazišťan – Lenka Zajíčková – Marek Eliáš – Karol Jesenák – Katarína Pastorková

   The experimental work deals with measuring the temperature in the hot filament chemical vapour deposition (HF CVD) reactor by a purpose-built electronic circuit. The objective is to optimize the substrate temperature, one of the key technological parameters in the synthesis of carbon nanotubes. The main outcome of the work is the design and construction of a functional thermometer, its precision calibration and improved accuracy of temperature measurement.

Keywords: Carbon nanotubes, chemical vapour deposition, isolation amplifier


[full-paper]


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