Morphology and FT IR spectra of porous silicon

Martin Kopani – Milan Mikula – Daniel Kosnac – Jan Gregus – Emil Pincik

   The morphology and chemical bods of p-type and n-type porous Si was compared. The surface of n-type sample is smooth, homogenous without any features. The surface of p-type sample reveals micrometer-sized islands. FTIR investigation reveals various distribution of SiO_xH_y complexes in both p- and n-type samples. From the conditions leading to porous silicon layer formation (the presence of holes) we suggest both SiO_xH_y and SiF_xO_y complexes in the layer.

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