MEASUREMENTS, TECHNOLOGY, AND LAYOUT OF SENSITIVE ANISOTROPIC MAGNETORESISTIVE SENSORS

Hans Hauser – Günther Stangl – Michael Janiba – Ioanna Giouroudi

   Magnetic measurements and noise calculation are presented for anisotropic magnetoresistive (AMR) sensors with advanced layout for improved sensitivity. The AMR effect is increased up to almost 4%. Depending on the sensor layout, a field measurement resolution of 380 pT seems feasible.

Keywords: anisotropic magnetoresistance effect, thin permalloy film, demagnetizing factor, sensor noise

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