PROPERTIES OF Y2O3 THIN FILMS APPLICABLE IN MICRO-ELECTROCHEMICAL CELLS
Rastislav Ivanič - Volkmar Breternitz - Vladimír Tvarožek - Ivan Novotný - Christian Knedlik - Vlastimil Řeháček
This work deals with selected mechanical and electrical properties of thin films prepared by planar RF diode sputtering for application in micro-electrochemical biosensors. The properties of Y2O3 thin films prepared by RF sputtering are comparable with published data of bulk and Y2O3 films. They are suitable for an insulation in the vertically arranged micro-electrochemical cell.
Keywords: sputtering, micro-electrochemical sensor, interdigitated array of electrodes, insulating yttrium oxide thin film