PROPERTIES OF Y₂O₃ THIN FILMS APPLICABLE IN MICRO-ELECTROCHEMICAL CELLS

Rastislav Ivanič - Volkmar Breternitz - Vladimír Tvarožek - Ivan Novotný - Christian Knedlik - Vlastimil Řeháček

   This work deals with selected mechanical and electrical properties of thin films prepared by planar RF diode sputtering for application in micro-electrochemical biosensors. The properties of Y₂O₃ thin films prepared by RF sputtering are comparable with published data of bulk and Y₂O₃ films. They are suitable for an insulation in the vertically arranged micro-electrochemical cell.

Keywords: sputtering, micro-electrochemical sensor, interdigitated array of electrodes, insulating yttrium oxide thin film

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