MODELLING OF THE VIBRATION OF THE COMPOSITE MICRO-ELECTRO-MECHANICAL SYSTEMS

Justín Murín - Juraj Hrabovský - Juraj Paulech - Vladimír Kutiš - František Janíček

   The micro-electro-mechanical devices, like the sensors and actuators, are very often used in the automotive electronics and mechatronics. The body of the devices is built as the single micro-beam, -plate and -shell as the micro-mechanical structures. The knowledge of the dynamic properties, like the eigenfrequency and eigenmodes, is very important from responsibility and safe functionality point of view. The results of modal analysis of chosen beam micro-actuator made of the composite material with varying material properties are presented in the proposed contribution. Effect of electro-thermo-mechanical axial force on the actuator eigenfrequency has been studied and evaluated. Our new FGM beam finite element is used in the proposed modal analysis. Obtained results have been verified by 3D solid finite element.

Keywords: micro-electro-mechanical actuator, functionally graded material, modal analysis, FGM beam finite element

[full-paper]